Particle in Cell simulations with Monte Carlo Collisions (PIC MCC) are employed to simulate the spatiotemporal evolution of the EEDF and IED in capacitively and inductively coupled plasmas. Of special interest is the application of tailored voltage waveforms to control the profile of the IED. Simulations are complemented with experimental measurements using Langmuir probes as well as non intrusive optical diagnostics (EEDF), and retarding field energy analysis (IED).

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